JPH0481868B2 - - Google Patents

Info

Publication number
JPH0481868B2
JPH0481868B2 JP58244784A JP24478483A JPH0481868B2 JP H0481868 B2 JPH0481868 B2 JP H0481868B2 JP 58244784 A JP58244784 A JP 58244784A JP 24478483 A JP24478483 A JP 24478483A JP H0481868 B2 JPH0481868 B2 JP H0481868B2
Authority
JP
Japan
Prior art keywords
layer
metal layer
opening
metal
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58244784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60138977A (ja
Inventor
Kimihiro Nakamura
Mitsuru Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP24478483A priority Critical patent/JPS60138977A/ja
Priority to DE19843445775 priority patent/DE3445775C2/de
Publication of JPS60138977A publication Critical patent/JPS60138977A/ja
Publication of JPH0481868B2 publication Critical patent/JPH0481868B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP24478483A 1983-12-27 1983-12-27 半導体形静電容量式圧力センサ Granted JPS60138977A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP24478483A JPS60138977A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサ
DE19843445775 DE3445775C2 (de) 1983-12-27 1984-12-12 Kapazitiver Halbleiterdruckaufnehmer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24478483A JPS60138977A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサ

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP18650592A Division JP2501722B2 (ja) 1992-07-14 1992-07-14 半導体形静電容量式圧力センサ
JP18650692A Division JPH0697699B2 (ja) 1992-07-14 1992-07-14 半導体形静電容量式圧力センサ

Publications (2)

Publication Number Publication Date
JPS60138977A JPS60138977A (ja) 1985-07-23
JPH0481868B2 true JPH0481868B2 (en]) 1992-12-25

Family

ID=17123869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24478483A Granted JPS60138977A (ja) 1983-12-27 1983-12-27 半導体形静電容量式圧力センサ

Country Status (2)

Country Link
JP (1) JPS60138977A (en])
DE (1) DE3445775C2 (en])

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
DE3635462A1 (de) * 1985-10-21 1987-04-23 Sharp Kk Feldeffekt-drucksensor
JPS62156879A (ja) * 1985-12-28 1987-07-11 Nec Corp 半導体圧力検知装置の製造方法
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JP2811768B2 (ja) * 1989-07-17 1998-10-15 株式会社デンソー 半導体式加速度センサおよびその製造方法
JP2822486B2 (ja) * 1989-09-27 1998-11-11 株式会社デンソー 感歪センサおよびその製造方法
JP2517467B2 (ja) * 1990-10-05 1996-07-24 山武ハネウエル株式会社 静電容量式圧力センサ
FI115487B (fi) 2004-05-03 2005-05-13 Vti Technologies Oy Menetelmä kapasitiivisen paineanturin valmistamiseksi ja kapasitiivinen paineanturi
JP4930258B2 (ja) * 2007-08-06 2012-05-16 トヨタ車体株式会社 スライドドア装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115370A (en) * 1979-02-27 1980-09-05 Fujitsu Ltd Electrostatic type converter
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer

Also Published As

Publication number Publication date
DE3445775A1 (de) 1985-07-04
DE3445775C2 (de) 1994-02-03
JPS60138977A (ja) 1985-07-23

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